JPH0260231U - - Google Patents
Info
- Publication number
- JPH0260231U JPH0260231U JP13970288U JP13970288U JPH0260231U JP H0260231 U JPH0260231 U JP H0260231U JP 13970288 U JP13970288 U JP 13970288U JP 13970288 U JP13970288 U JP 13970288U JP H0260231 U JPH0260231 U JP H0260231U
- Authority
- JP
- Japan
- Prior art keywords
- needle valve
- flow rate
- bubbler
- raw material
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 3
- 239000012159 carrier gas Substances 0.000 claims 2
- 239000002994 raw material Substances 0.000 claims 2
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13970288U JPH0260231U (en]) | 1988-10-26 | 1988-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13970288U JPH0260231U (en]) | 1988-10-26 | 1988-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0260231U true JPH0260231U (en]) | 1990-05-02 |
Family
ID=31403207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13970288U Pending JPH0260231U (en]) | 1988-10-26 | 1988-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0260231U (en]) |
-
1988
- 1988-10-26 JP JP13970288U patent/JPH0260231U/ja active Pending